Mechanics of Solids (about journal) Mechanics of Solids
A Journal of Russian Academy of Sciences
 Founded
in January 1966
Issued 6 times a year
Print ISSN 0025-6544
Online ISSN 1934-7936

Russian Russian English English About Journal | Issues | Guidelines | Editorial Board | Contact Us
 


IPMech RASWeb hosting is provided
by the Ishlinsky Institute for
Problems in Mechanics
of the Russian
Academy of Sciences
IssuesArchive of Issues2022-5pp.1044-1053

Archive of Issues

Total articles in the database: 10864
In Russian (. . ): 8009
In English (Mech. Solids): 2855

<< Previous article | Volume 57, Issue 5 / 2022 | Next article >>
N.A. Dyuzhev, E.E. Gusev, and M.A. Makhiboroda, "Study of the Mechanical Properties of Thin-Film Membranes Made of Oxide and Silicon Nitride," Mech. Solids. 57 (5), 1044-1053 (2022)
Year 2022 Volume 57 Number 5 Pages 1044-1053
DOI 10.3103/S002565442205017X
Title Study of the Mechanical Properties of Thin-Film Membranes Made of Oxide and Silicon Nitride
Author(s) N.A. Dyuzhev (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
E.E. Gusev (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia, bubbledouble@mail.ru)
M.A. Makhiboroda (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
Abstract Thin-film membranes are made from alternating layers of silicon oxide and silicon nitride using a group technology. The influence of the number of layers constituting the membrane, while maintaining its thickness, on the value of mechanical strength has been studied. The burst pressure of a membrane structure 560 μm in diameter varies from 0.9 to 1.65 atm for 30 samples, depending on the number of membrane layers. The mechanical strength of the Si3N4/SiO2 structure varies from 10.5 to 19.2 GPa. It is shown that the region of discontinuity of the structure is localized at the membrane/substrate interface.
Keywords mechanical strength, membranes, thin films, silicon oxide, silicon nitride
Received 11 January 2022Revised 12 January 2022Accepted 13 January 2022
Link to Fulltext
<< Previous article | Volume 57, Issue 5 / 2022 | Next article >>
Orphus SystemIf you find a misprint on a webpage, please help us correct it promptly - just highlight and press Ctrl+Enter

101 Vernadsky Avenue, Bldg 1, Room 246, 119526 Moscow, Russia (+7 495) 434-3538 mechsol@ipmnet.ru https://mtt.ipmnet.ru
Founders: Russian Academy of Sciences, Branch of Power Industry, Machine Building, Mechanics and Control Processes of RAS, Ishlinsky Institute for Problems in Mechanics RAS
© Mechanics of Solids
webmaster
Rambler's Top100