 | | Mechanics of Solids
A Journal of Russian Academy of Sciences | | Founded
in January 1966
Issued 6 times a year
Print ISSN 0025-6544
Online ISSN 1934-7936 |
Archive of Issues
| Total articles in the database: | | 12804 |
| In Russian (Èçâ. ÐÀÍ. ÌÒÒ): | | 8044
|
| In English (Mech. Solids): | | 4760 |
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| E.A. Gosteva, K.I. Rubtsova, M.D. Silina, and V.V. Starkov, "Formation of Gradient-Porous Silicon Structures with Variable Pore Morphology," Mech. Solids. 55 (1), 103-107 (2020) |
| Year |
2020 |
Volume |
55 |
Number |
1 |
Pages |
103-107 |
| DOI |
10.3103/S0025654420010094 |
| Title |
Formation of Gradient-Porous Silicon Structures with Variable Pore Morphology |
| Author(s) |
E.A. Gosteva (National University of Science and Technology MISiS, Moscow, 119991 Russia)
K.I. Rubtsova (National University of Science and Technology MISiS, Moscow, 119991 Russia, rubcova.karina@gmail.com)
M.D. Silina (National University of Science and Technology MISiS, Moscow, 119991 Russia, theinnercrow@yandex.ru)
V.V. Starkov (Institute of Microelectronics Technology and High-Purity Materials of the Russian Academy of Sciences, Chernogolovka, Noginskii raion, Moskovskaya obl., 142432 Russia) |
| Abstract |
The paper presents the results of experiments on the formation of GPS-var structures using hydrofluoric acid (HF) electrolytes in solutions of ethyl (C2H5OH) and isopropyl alcohol (CH3CH(OH)CH3) at various component ratios. It was experimentally shown that the use of electrolytes based on CH3CH(OH)CH3 allows the formation of a GPS-var structure with a nanoporous layer of silicon, while the resulting porous layer does not collapse and is suitable for further use. |
| Keywords |
gradient-porous variable silicon structures, mechanical strength, anodic etching, disproportionation |
| Received |
25 August 2019 | Revised |
02 September 2019 | Accepted |
18 September 2019 |
| Link to Fulltext |
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