Mechanics of Solids (about journal) Mechanics of Solids
A Journal of Russian Academy of Sciences
 Founded
in January 1966
Issued 6 times a year
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IssuesArchive of Issues2025-2pp.839-847

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Total articles in the database: 13205
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N.A. Djuzhev, E.E. Gusev, M.Y. Fomichev, P.S. Ivanin, I.V. Kushnarev, and V.A. Bespalov, "Multifunctional Shuttle for Processing Small Diameter and Ultra-Thin Semiconductor Wafers," Mech. Solids. 60 (2), 839-847 (2025)
Year 2025 Volume 60 Number 2 Pages 839-847
DOI 10.1134/S0025654424605226
Title Multifunctional Shuttle for Processing Small Diameter and Ultra-Thin Semiconductor Wafers
Author(s) N.A. Djuzhev (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
E.E. Gusev (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia, bubbledouble@mail.ru)
M.Y. Fomichev (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
P.S. Ivanin (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
I.V. Kushnarev (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
V.A. Bespalov (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
Abstract In a first for Russia, a 100 mm diameter wafer was processed to create holes for TSV structures using automated equipment designed for 150 mm diameter wafers without needing to reconfigure the installations. A shuttle wafer was developed for this purpose. The reliability of the silicon shuttle was determined through experimental studies of the mechanical strength of silicon. The thickness of the ultra-thin Si wafer that can be processed without damage in the shuttle wafer on installations with a vacuum table was calculated based on the data obtained.
Keywords microassembly, 3D integration, TSV, surface relief, photolithography, DRIE, temporary bonding
Received 02 September 2024Revised 03 October 2024Accepted 05 October 2024
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