 | | Mechanics of Solids
A Journal of Russian Academy of Sciences | | Founded
in January 1966
Issued 6 times a year
Print ISSN 0025-6544
Online ISSN 1934-7936 |
Archive of Issues
| Total articles in the database: | | 12949 |
| In Russian (Èçâ. ÐÀÍ. ÌÒÒ): | | 8096
|
| In English (Mech. Solids): | | 4853 |
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| Guang Han, "Vibration Analysis and Signal Detection for the Cross-Shaped Micro Resonator," Mech. Solids. 59 (4), 2582-2593 (2024) |
| Year |
2024 |
Volume |
59 |
Number |
4 |
Pages |
2582-2593 |
| DOI |
10.1134/S0025654424604336 |
| Title |
Vibration Analysis and Signal Detection for the Cross-Shaped Micro Resonator |
| Author(s) |
Guang Han (Hebei Collaborative Innovation Center of Green Intelligent Manufacturing Application Technology for Building Materials, Mechanical and Electrical Engineering Department, HebeiConstruction Material Vocational and Technical College, Qinhuangdao, 066004 China, lightlightlight@163.com) |
| Abstract |
Resonant sensors are extensively utilized in engineering applications owing to simple mechanical structure, high sensitivity, and reliable stability. To further enhance the performance of
resonant sensors, a common approach in industrial production is reducing the size of components to increase sensitivity. However, the reduction in size leads to the weaker output signals, which increasing
the difficulty of signal detection. To solve this problem, this paper proposed a cross-shaped resonator
to enhance the output signal by increasing the electrode plate area. This approach was expected to alleviate the signal attenuation dilemma associated with miniaturization, thereby advancing sensor performance in various engineering applications. In the sensor design, the vibration characteristics analysis
of the model as a continuous system was a key step in determining design parameters. The vibration
equation of the continuous system for this structure was established and a comprehensive solution
methodology was proposed. Furthermore, the natural frequency and amplitude-frequency characteristic curves of the system were investigated to ensure precise performance prediction. Using advanced
micromachining techniques, we successfully fabricated a cross-shaped micro resonator. The subsequent experimental tests confirmed the theoretical correctness and practical feasibility of our design.
The results provide valuable guidance and insights for optimizing the design and performance of resonant sensors. |
| Keywords |
vibration of continuous system, MEMS, cross-shaped micro resonator, capacitance detection |
| Received |
18 June 2024 | Revised |
24 September 2024 | Accepted |
24 September 2024 |
| Link to Fulltext |
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