 | | Mechanics of Solids
A Journal of Russian Academy of Sciences | | Founded
in January 1966
Issued 6 times a year
Print ISSN 0025-6544
Online ISSN 1934-7936 |
Archive of Issues
| Total articles in the database: | | 12788 |
| In Russian (Èçâ. ÐÀÍ. ÌÒÒ): | | 8028
|
| In English (Mech. Solids): | | 4760 |
|
| << Previous article | Volume 59, Issue 2 / 2024 | Next article >> |
| N.A. Dyuzhev, E.E. Gusev, E.O. Portnova, and O.V. Novikova, "Influence of Cyclic Loading on Physical and Mechanical Properties of Thin-Film Membrane Structures," Mech. Solids. 59 (2), 746-753 (2024) |
| Year |
2024 |
Volume |
59 |
Number |
2 |
Pages |
746-753 |
| DOI |
10.1134/S002565442360188X |
| Title |
Influence of Cyclic Loading on Physical and Mechanical Properties of Thin-Film Membrane Structures |
| Author(s) |
N.A. Dyuzhev (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
E.E. Gusev (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia, bubbledouble@mail.ru)
E.O. Portnova (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
O.V. Novikova (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia) |
| Abstract |
The principle of modifying the mechanical properties of thin-film membrane structures of
arbitrary shape by a non-contact method was proposed, implemented and explained for the first time.
The idea was tested on a thin-film aluminum membrane formed by the magnetron method on a silicon
substrate. The external influence was carried out through a cyclic load in the form of releasing and supplying excess air pressure to the membrane. As a result of repeated impacts, the physical properties of
materials (grain size and roughness) and mechanical properties (internal mechanical stresses and critical overpressure) change. Changing the magnitude of residual mechanical stresses in the membrane
material allows the formation of a surface with the required curvature value. In this work, after a cyclic
load with a pressure equal to half the critical pressure, the following effects were revealed: the deflection of the membrane in the absence of external influence increased by more than an order of magnitude, the structure passed into a plastic type of deformation, the critical burst pressure decreased by
several tens of percent. The use of this methodology makes it possible to create new materials with unique mechanical properties. |
| Keywords |
mechanical properties, grain size, thin films, membranes, mechanical strength, fatigue, failure, cyclic loading |
| Received |
23 August 2023 | Revised |
27 September 2023 | Accepted |
01 October 2023 |
| Link to Fulltext |
|
| << Previous article | Volume 59, Issue 2 / 2024 | Next article >> |
|
 If you find a misprint on a webpage, please help us correct it promptly - just highlight and press Ctrl+Enter
|
|
Russian 
English