Mechanics of Solids (about journal) Mechanics of Solids
A Journal of Russian Academy of Sciences
 Founded
in January 1966
Issued 6 times a year
Print ISSN 0025-6544
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IssuesArchive of Issues2024-2pp.746-753

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Total articles in the database: 12854
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N.A. Dyuzhev, E.E. Gusev, E.O. Portnova, and O.V. Novikova, "Influence of Cyclic Loading on Physical and Mechanical Properties of Thin-Film Membrane Structures," Mech. Solids. 59 (2), 746-753 (2024)
Year 2024 Volume 59 Number 2 Pages 746-753
DOI 10.1134/S002565442360188X
Title Influence of Cyclic Loading on Physical and Mechanical Properties of Thin-Film Membrane Structures
Author(s) N.A. Dyuzhev (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
E.E. Gusev (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia, bubbledouble@mail.ru)
E.O. Portnova (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
O.V. Novikova (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
Abstract The principle of modifying the mechanical properties of thin-film membrane structures of arbitrary shape by a non-contact method was proposed, implemented and explained for the first time. The idea was tested on a thin-film aluminum membrane formed by the magnetron method on a silicon substrate. The external influence was carried out through a cyclic load in the form of releasing and supplying excess air pressure to the membrane. As a result of repeated impacts, the physical properties of materials (grain size and roughness) and mechanical properties (internal mechanical stresses and critical overpressure) change. Changing the magnitude of residual mechanical stresses in the membrane material allows the formation of a surface with the required curvature value. In this work, after a cyclic load with a pressure equal to half the critical pressure, the following effects were revealed: the deflection of the membrane in the absence of external influence increased by more than an order of magnitude, the structure passed into a plastic type of deformation, the critical burst pressure decreased by several tens of percent. The use of this methodology makes it possible to create new materials with unique mechanical properties.
Keywords mechanical properties, grain size, thin films, membranes, mechanical strength, fatigue, failure, cyclic loading
Received 23 August 2023Revised 27 September 2023Accepted 01 October 2023
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