Mechanics of Solids (about journal) Mechanics of Solids
A Journal of Russian Academy of Sciences
 Founded
in January 1966
Issued 6 times a year
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IssuesArchive of Issues2024-1pp.20-26

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N.A. Dyuzhev, E.E. Gusev, E.O. Portnova, and M.A. Makhiboroda, "Study of the Effect of Radiation Exposure on Grain Size and Mechanical Properties of Thin-Film Aluminum," Mech. Solids. 59 (1), 20-26 (2024)
Year 2024 Volume 59 Number 1 Pages 20-26
DOI 10.1134/S0025654423601040
Title Study of the Effect of Radiation Exposure on Grain Size and Mechanical Properties of Thin-Film Aluminum
Author(s) N.A. Dyuzhev (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
E.E. Gusev (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia, bubbledouble@mail.ru)
E.O. Portnova (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
M.A. Makhiboroda (National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498 Russia)
Abstract For the first time, an experimental dependence of the grain size and mechanical properties of a thin-film aluminum material on the dose of short-wave radiation has been obtained. A thin film of aluminum was formed on a silicon substrate using magnetron sputtering. The effect of a decrease in mechanical strength and biaxial elastic modulus with increasing radiation dose was identified. This effect is explained by a decrease in grain size and roughness on a thin-film aluminum membrane. For the microscopically measured range of aluminum grain sizes, the inverse Hall-Petch relation is used. During the research, it was determined that during irradiation the number of grain boundaries and the number of grains themselves increases, which leads to an increase in the likelihood of deformation.
Keywords mechanical properties, grain size, thin films, membranes, mechanical strength, biaxial elastic modulus
Received 30 May 2023Revised 07 June 2023Accepted 11 June 2023
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