 | | Mechanics of Solids
A Journal of Russian Academy of Sciences | | Founded
in January 1966
Issued 6 times a year
Print ISSN 0025-6544
Online ISSN 1934-7936 |
Archive of Issues
| Total articles in the database: | | 11262 |
| In Russian (Èçâ. ÐÀÍ. ÌÒÒ): | | 8011
|
| In English (Mech. Solids): | | 3251 |
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| D.A. Indeytsev, N.V. Mozhgova, A.V. Lukin, and I.A. Popov, "Model of a Micromechanical Modal-Localized Accelerometer with a Sensitive Element in the Form of a Beam with an Initial Deflection," Mech. Solids. 58 (3), 779-792 (2023) |
| Year |
2023 |
Volume |
58 |
Number |
3 |
Pages |
779-792 |
| DOI |
10.3103/S0025654422601355 |
| Title |
Model of a Micromechanical Modal-Localized Accelerometer with a Sensitive Element in the Form of a Beam with an Initial Deflection |
| Author(s) |
D.A. Indeytsev (Institute for Problems in Mechanical Engineering of the RAS, St.-Petersburg, 199178 Russia; Peter the Great St. Petersburg Polytechnic University, St.-Petersburg, 195251 Russia)
N.V. Mozhgova (Peter the Great St. Petersburg Polytechnic University, St.-Petersburg, 195251 Russia, nmojgova@yandex.ru)
A.V. Lukin (Peter the Great St. Petersburg Polytechnic University, St.-Petersburg, 195251 Russia, lukin_av@spbstu.ru)
I.A. Popov (Peter the Great St. Petersburg Polytechnic University, St.-Petersburg, 195251 Russia, popov_ia@spbstu.ru) |
| Abstract |
The present study is devoted to mathematical modeling of the proposed new architecture of a microelectromechanical modally localized acceleration sensor (MEMS accelerometer/gravimeter) with a sensitive element in the form of a microbeam pinched at both ends with an initial deflection, made in the form of the first asymmetric mode of free vibrations. The article demonstrates that with an asymmetric form of the initial deflection in the region of positive axial forces, there are zones of proximity of the frequency branches corresponding to the second symmetric and the first asymmetric vibration modes. When the required value of the axial tensile force in the microbeam is provided structurally, this effect can be used, in particular, to measure the axial component of the transfer acceleration according to the principle of amplitude modal localization. The possibility of heating the sensitive element with the help of an electric current flowing through the microbeam, provided in the sensor layout, makes it possible to control the operating point of the oscillation mode and, thus, to vary the range of measured accelerations and the degree of sensor sensitivity within a very wide range. The configuration of the oscillation excitation and output signal pickup electrodes proposed in the article makes it possible, with the help of a feedback loop, to stabilize the oscillation amplitude at the required level in the working (third) symmetrical form and, at the same time, to measure the oscillation amplitude associated with the change in the value of the measured component of the portable acceleration according to the asymmetric form. Thus, a mathematical model of an original modal-localized accelerometer (gravimeter) containing a single sensitive microbeam element and involving the effect of energy exchange between its various modes of vibration is proposed and investigated in the article. |
| Keywords |
MEMS, beam with initial deflection, bistability, accelerometer, modal vibration localization, frequency proximity |
| Received |
19 August 2022 | Revised |
07 September 2022 | Accepted |
08 September 2022 |
| Link to Fulltext |
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