 | | Mechanics of Solids
A Journal of Russian Academy of Sciences | | Founded
in January 1966
Issued 6 times a year
Print ISSN 0025-6544
Online ISSN 1934-7936 |
Archive of Issues
| Total articles in the database: | | 11223 |
| In Russian (Èçâ. ÐÀÍ. ÌÒÒ): | | 8011
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| In English (Mech. Solids): | | 3212 |
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| A.S. Grashchenko, S.A. Kukushkin, A.V. Osipov, and A.V. Red'kov, "Investigation of the Physicomechanical Characteristics of Nanoscale Films by Nanoindentation," Mech. Solids. 53 (5), 481-488 (2018) |
| Year |
2018 |
Volume |
53 |
Number |
5 |
Pages |
481-488 |
| DOI |
10.3103/S0025654418080010 |
| Title |
Investigation of the Physicomechanical Characteristics of Nanoscale Films by Nanoindentation |
| Author(s) |
A.S. Grashchenko (Institute of Problems in Mechanical Engineering of the Russian Academy of Sciences, Bol'shoy pr. 61, St. Petersburg, 199078 Russia)
S.A. Kukushkin (Institute of Problems in Mechanical Engineering of the Russian Academy of Sciences, Bol'shoy pr. 61, St. Petersburg, 199078 Russia, sergey.a.kukushkin@gmail.com)
A.V. Osipov (Institute of Problems in Mechanical Engineering of the Russian Academy of Sciences, Bol'shoy pr. 61, St. Petersburg, 199078 Russia)
A.V. Red'kov (Institute of Problems in Mechanical Engineering of the Russian Academy of Sciences, Bol'shoy pr. 61, St. Petersburg, 199078 Russia) |
| Abstract |
This article presents a brief review and original studies of the elastic-plastic properties of nanoscale and microscale thin films on substrates. Studies are conducted on the example of wide gap semiconductor films, which are extremely important for modern micro-and-optoelectronics, such as: gallium nitride, silicon carbide and gallium oxide grown on silicon substrates. The focus is on the effect of film nanoscale on methods for analyzing experimental nanoindentation results. In particular, methods for the analysis of two-layer nanoscale films, as well as films of anisotropic materials, are discussed. With the help of Raman maps, the dynamics of elastic stresses in the indenter area are analyzed. The main methods for modeling the elastoplastic properties of films by quantum chemistry and molecular dynamics are considered. |
| Keywords |
nanoindentation, nanoscale films, gallium nitride, silicon carbide, gallium oxide, elastic-plastic properties |
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|
| Received |
23 April 2018 |
| Link to Fulltext |
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