Mechanics of Solids (about journal) Mechanics of Solids
A Journal of Russian Academy of Sciences
 Founded
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IssuesArchive of Issues2020-1pp.103-107

Archive of Issues

Total articles in the database: 4725
In Russian (. . ): 2266
In English (Mech. Solids): 2459

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E.A. Gosteva, K.I. Rubtsova, M.D. Silina, and V.V. Starkov, "Formation of Gradient-Porous Silicon Structures with Variable Pore Morphology," Mech. Solids. 55 (1), 103-107 (2020)
Year 2020 Volume 55 Number 1 Pages 103-107
DOI 10.3103/S0025654420010094
Title Formation of Gradient-Porous Silicon Structures with Variable Pore Morphology
Author(s) E.A. Gosteva (National University of Science and Technology MISiS, Moscow, 119991 Russia)
K.I. Rubtsova (National University of Science and Technology MISiS, Moscow, 119991 Russia, rubcova.karina@gmail.com)
M.D. Silina (National University of Science and Technology MISiS, Moscow, 119991 Russia, theinnercrow@yandex.ru)
V.V. Starkov (Institute of Microelectronics Technology and High-Purity Materials of the Russian Academy of Sciences, Chernogolovka, Noginskii raion, Moskovskaya obl., 142432 Russia)
Abstract The paper presents the results of experiments on the formation of GPS-var structures using hydrofluoric acid (HF) electrolytes in solutions of ethyl (C2H5OH) and isopropyl alcohol (CH3CH(OH)CH3) at various component ratios. It was experimentally shown that the use of electrolytes based on CH3CH(OH)CH3 allows the formation of a GPS-var structure with a nanoporous layer of silicon, while the resulting porous layer does not collapse and is suitable for further use.
Keywords gradient-porous variable silicon structures, mechanical strength, anodic etching, disproportionation
Received 25 August 2019Revised 02 September 2019Accepted 18 September 2019
Link to Fulltext https://link.springer.com/article/10.3103/S0025654420010094
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